{"id":6261,"date":"2024-07-18T14:21:56","date_gmt":"2024-07-18T06:21:56","guid":{"rendered":"https:\/\/www.hotchip.com.cn\/?p=6261"},"modified":"2024-07-18T14:22:35","modified_gmt":"2024-07-18T06:22:35","slug":"memscgqxpsjgs-hxbkjqzbjdzhybg","status":"publish","type":"post","link":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/","title":{"rendered":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746"},"content":{"rendered":"

\u57283D IC\u5c01\u88c5\u4e2d\uff0c\u6211\u4eec\u7ecf\u5e38\u770b\u5230\u903b\u8f91\uff0c\u5b58\u50a8\uff0c\u5c04\u9891\u548cMEMS\u82af\u7247\u88ab\u96c6\u6210\u5728\u4e00\u8d77MEMS\u82af\u7247\u8f66\u6d88\u8d39\u7535\u5b50\u6c7d\u8f66\u884c\u4e1a\uff0c\u533b\u7597\u548c\u822a\u5929\u822a\u7a7a\u7b49\u5404\u4e2a\u9886\u57df\uff0c\u90fd\u6709\u5e7f\u6cdb\u7684\u5e94\u7528\u3002\u90a3\u4e48mems\u82af\u7247\u5230\u5e95\u662f\u4ec0\u4e48\u5462\uff1fMEMS\u7684\u5168\u79f0\u662f\u5fae\u673a\u7535\u7cfb\u7edf\uff0c\u7b80\u5355\u6765\u8bf4\u5c31\u662f\u5229\u7528\u5fae\u7eb3\u52a0\u5de5\u6280\u672f\uff0c\u5728\u7845\u7247\u4e0a\uff0c\u5236\u9020\u51fa\u975e\u5e38\u5fae\u5c0f\u7684\u7535\u5b50\u673a\u68b0\u7cfb\u7edf\uff0c\u4e5f\u5c31\u662f\u505a\u51fa\u5fae\u7c73\u6216\u7eb3\u7c73\u7ea7\u522b\u7684\u673a\u68b0\u7cfb\u7edf\u3002\u8fd9\u4e2a\u7cfb\u7edf\uff0c\u53ef\u4ee5\u628a\u5916\u754c\u7684\u7269\u7406\u6216\u5316\u5b66\u4fe1\u53f7\u8f6c\u5316\u4e3a\u7535\u4fe1\u53f7\u3002<\/p>

\"\u7b2c\u5341\u4e94\u5c4a\u4e2d\u56fd\u6df1\u5733\u521b\u65b0\u521b\u4e1a\u5927\u8d5b\u4e8c\u7b49\u5956\"<\/figure>

MEMS\u82af\u7247<\/strong>\u7684\u4e3b\u8981\u7528\u9014\u662f\u4ec0\u4e48\u5462\uff1f\u5b83\u4eec\u6700\u5e38\u89c1\u7684\u5e94\u7528\u5c31\u662f\u4f5c\u4e3a\u4f20\u611f\u5668\uff0cMEMS\u4f20\u611f\u5668\u53ef\u4ee5\u68c0\u6d4b\u6e29\u5ea6\uff0c\u538b\u529b\uff0c\u5149\u5f3a\u5ea6\uff0c\u6e7f\u5ea6\u52a0\u901f\u5ea6\u548c\u58f0\u97f3\u7b49\u5404\u79cd\u7269\u7406\u91cf\uff0c\u5e76\u5c06\u8fd9\u4e9b\u4fe1\u606f\u8f6c\u5316\u6210\u4e3a\u7535\u4fe1\u53f7\uff0c\u4ee5\u4fbf\u6211\u4eec\u5bf9\u73af\u5883\u6761\u4ef6\u80fd\u591f\u8fdb\u884c\u76d1\u6d4b\uff0c\u8fd9\u6709\u70b9\u7c7b\u4f3c\u4e8e\u4eba\u4f53\u7684\u611f\u5b98\u7cfb\u7edf\uff0c\u5c31\u50cf\u6211\u4eec\u7684\u8033\u6735\uff0c\u76ae\u80a4\uff0c\u9f3b\u5b50\u7b49\u5668\u5b98\u4e00\u6837\uff0c\u5e2e\u52a9\u6211\u4eec\u611f\u77e5\u5468\u56f4\u7684\u4e16\u754c\u3002\u6bd4\u5982\u538b\u529b\u4f20\u611f\u5668\u5c31\u50cf\u6211\u4eec\u7684\u76ae\u80a4\uff0c\u53ef\u4ee5\u611f\u53d7\u5230\u538b\u529b\uff0c\u5316\u5b66\u4f20\u611f\u5668\u5c31\u50cf\u6211\u4eec\u7684\u9f3b\u5b50\uff0c\u80fd\u591f\u95fb\u5230\u5473\u9053\u3002\u52a0\u901f\u5ea6\u8ba1\uff0c\u9640\u87ba\u4eea\u548c\u78c1\u4f20\u611f\u5668\u82af\u7247\u5c31\u50cf\u6211\u4eec\u7684\u5c0f\u8111\uff0c\u5e2e\u52a9\u6211\u4eec\u611f\u77e5\u65b9\u5411\u548c\u52a0\u901f\u5ea6\u7b49\uff0cMEMS\u82af\u7247\u4e5f\u662f\u4ee5\u6676\u5706\u4e3a\u8f7d\u4f53\u505a\u51fa\u6765\u7684\uff0c\u4f46\u662f\u5374\u5206\u4e0d\u6e05MEMS\u82af\u7247\u4e0eIC\u82af\u7247\u7684\u5236\u4f5c\u5de5\u827a\u6709\u4ec0\u4e48\u533a\u522b\u3002<\/p>

\u9996\u5148MEMS\u82af\u7247\u7684\u7ebf\u5bbd\u4ece1\u6beb\u7c73\u52301\u5fae\u7c73\uff0c\u50cfIC\u82af\u7247\u90a3\u6837\uff0c\u8ffd\u6c4228\u7eb3\u7c73\u300114\u7eb3\u7c73\u8d85\u7ec6\u7684\u7ebf\u5bbd\uff0c\u56e0\u6b64\u5f88\u591aMEMS\u6676\u5706\u5382\u7684\u8bbe\u5907\uff0c\u5f88\u591a\u90fd\u662f\u5b58\u50a8\u5382\u903b\u8f91\u5382\u6dd8\u6c70\u4e0b\u6765\u7684\u4e8c\u624b\u8bbe\u5907\uff0c\u53e6\u5916MEMS\u6676\u5706\u5382\u5728\u65e0\u5c18\u95f4\u7684\u6d01\u51c0\u7b49\u7ea7\u3001\u81ea\u52a8\u5316\u7a0b\u5ea6\u7b49\u65b9\u9762\uff0c\u53c8\u6bd412\u5bf8IC\u6676\u5706\u5382\u7a0d\u5fae\u5bbd\u677e\u4e00\u4e9b\uff0c\u5176\u6b21MEMS\u82af\u7247\u7684\u79cd\u7c7b\u975e\u5e38\u4e30\u5bcc\uff0c\u7279\u70b9\u662f12\u5bf8IC\u82af\u7247\u65e0\u6cd5\u6bd4\u62df\u7684\uff0c\u4e0d\u4ec5\u5305\u62ec\u5404\u79cd\u4f20\u611f\u5668\uff0c\u8fd8\u6709\u5fae\u578b\u6cf5\u3001\u5fae\u578b\u9a6c\u8fbe\u7b49\u5404\u79cd\u673a\u68b0\u7ed3\u6784\uff0c\u8fd9\u5c31\u610f\u5473\u7740\u5f88\u96be\u505a\u5230\u6807\u51c6\u5316\u5de5\u827a\uff0c\u6bcf\u4e00\u79cdMEMS\u82af\u7247\u7684\u5236\u9020\u90fd\u6709\u5176\u72ec\u7279\u8981\u6c42\uff0c\u6b63\u56e0\u4e3a\u8bbe\u8ba1\u79cd\u7c7b\u591a\uff0cMEMS\u82af\u7247\u7684\u5de5\u827a\u5236\u7a0b\u589e\u52a0\u4e86\u8bb8\u591aIC\u5236\u7a0b\u6ca1\u6709\u7684\u5de5\u827a\uff0c\u4f8b\u5982\u7528\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680DRIE\uff0c\u6765\u505a\u6df1\u6c9f\u69fd\u548c\u590d\u6742\u76843D\u7ed3\u6784\uff0c\u6709\u4e9b\u6df1\u5ea6\u751a\u81f3\u53ef\u4ee5\u8fbe\u5230\u51e0\u767e\u5fae\u7c73\uff0c\u8fd9\u4e2a\u6df1\u5ea6\u5728IC\u5236\u7a0b\u4e2d\u662f\u4e0d\u53ef\u60f3\u8c61\u7684\uff0c\u53e6\u5916\u6676\u5706\u952e\u5408\u5de5\u827a\uff0c\u6e7f\u6cd5\u523b\u8680\u5de5\u827a\uff0c\u8d34\u5e72\u819c\u5de5\u827a\uff0c\u5fae\u6d41\u4f53\u5de5\u827a\uff0c\u7535\u9540\u5de5\u827a\u7b49\uff0c\u5728IC\u5236\u7a0b\u4e2d\u4e5f\u4e0d\u5e38\u89c1\uff0c\u56e0\u6b64\u4e24\u8005\u7684\u5236\u4f5c\u65b9\u5f0f\u548c\u5e94\u7528\u9886\u57df\u90fd\u6709\u5f88\u5927\u7684\u4e0d\u540c\u3002<\/p>

MEMS\u548cIC\u7684\u5c01\u88c5\u533a\u522b<\/strong><\/strong><\/td><\/tr>
MEMS(\u57fa\u4e8e\u7845\u886c\u5e95)<\/td>IC<\/td><\/tr>
   \u590d\u6742\u7684\u4e09\u7ef4\u7ed3\u6784<\/td>  \u4e3b\u8981\u4e3a\u4e8c\u7ef4\u7ed3\u6784<\/td><\/tr>
   \u5f88\u591a\u7cfb\u7edf\u542b\u6709\u53ef\u52a8\u7684\u56fa\u4f53\u7ed3\u6784\u6216\u6db2\u4f53<\/td>  \u56fa\u5b9a\u7684\u8584\u56fa\u4f53\u7ed3\u6784<\/td><\/tr>
   \u9700\u8981\u5c06\u5fae\u7ed3\u6784\u548c\u5fae\u7535\u5b50\u8fdb\u884c\u96c6\u6210<\/td>  \u4e0d\u9700\u8981\u8fd9\u79cd\u96c6\u6210<\/td><\/tr>
 \u5728\u751f\u7269\u5b66\u3001\u5316\u5b66\u3001\u5149\u5b66\u4ee5\u53ca\u7535\u52a8\u673a\u68b0\u65b9\u9762\u53ef\u4ee5\u5b9e\u73b0\u4e0d\u540c\u7684\u529f\u80fd<\/td>  \u4e3a\u7279\u5b9a\u7684\u7535\u5b50\u529f\u80fd\u5b9e\u73b0\u7535\u80fd\u4f20\u8f93<\/td><\/tr>
  \u5f88\u591a\u7ec4\u4ef6\u9700\u8981\u63a5\u89e6\u5de5\u4f5c\u4ecb\u8d28\u5e76\u5904\u4e8e\u6076\u52a3\u73af\u5883\u4e4b\u4e0b<\/td>  \u96c6\u6210\u7535\u8def\u6a21\u677f\u901a\u8fc7\u5305\u88c5\u4e0e\u5de5\u4f5c\u4ecb\u8d28\u76f8\u9694\u79bb<\/td><\/tr>
\u6d89\u53ca\u5404\u79cd\u4e0d\u540c\u7684\u6750\u6599\uff0c\u5982\u5355\u54c1\u7845\u3001\u7845\u5316\u5408\u7269\u3001GaAs\u3001\u77f3\u82f1\u3001\u805a\u5408\u7269\u4ee5\u53ca\u91d1\u5c5e\u7b49<\/td>\u53ea\u6d89\u53ca\u5c11\u91cf\u513f\u79cd\u6750\u6599\uff0c\u5982\u5355\u54c1\u7845\u3001\u7845\u5316\u5408\u7269\u3001\u5851\u6599\u548c\u9676\u74f7<\/td><\/tr>
   \u5f88\u591a\u5143\u4ef6\u9700\u8981\u7ec4\u88c5<\/td>  \u5c11\u91cf\u5143\u4ef6\u9700\u8981\u7ec4\u88c5<\/td><\/tr>
   \u57fa\u5e95\u4e0a\u7684\u56fe\u5f62\u76f8\u5bf9\u7b80\u5355<\/td>  \u57fa\u5e95\u4e0a\u7684\u56fe\u5f62\u76f8\u5bf9\u590d\u6742\u4e14\u5143\u4ef6\u5bc6\u5ea6\u5927<\/td><\/tr>
   \u5c11\u91cf\u7684\u9988\u7535\u5bfc\u4f53\u548c\u5bfc\u7ebf<\/td>  \u5927\u91cf\u7684\u9988\u7535\u5bfc\u4f53\u548c\u5bfc\u7ebf<\/td><\/tr>
   \u7f3a\u5c11\u5de5\u7a0b\u8bbe\u8ba1\u7684\u65b9\u6cd5\u548c\u6807\u51c6<\/td>  \u5b8c\u5907\u7684\u8bbe\u8ba1\u65b9\u6cd5\u548c\u6807\u51c6<\/td><\/tr>
   \u5c01\u88c5\u6280\u672f\u5904\u4e8e\u8d77\u6b65\u9636\u6bb5<\/td>  \u6210\u719f\u7684\u5c01\u88c5\u6280\u672f<\/td><\/tr>
   \u4e3b\u8981\u91c7\u7528\u4eba\u5de5\u8fdb\u884c\u7ec4\u88c5<\/td>  \u5176\u6709\u81ea\u52a8\u5316\u7684\u7ec4\u88c5\u6280\u672f<\/td><\/tr>
   \u7f3a\u4e4f\u53ef\u9760\u6027\u548c\u6027\u80fd\u6d4b\u8bd5\u7684\u6807\u51c6\u548c\u6280\u672f<\/td>  \u5df2\u6709\u6210\u6587\u7684\u6807\u51c6\u548c\u5904\u7406\u8fc7\u7a0b<\/td><\/tr>
   \u591a\u6837\u7684\u5236\u9020\u6280\u672f<\/td>  \u7ecf\u8fc7\u5b9e\u8df5\u68c0\u9a8c\u7684\u6210\u6587\u7684\u52a0\u5de5\u5236\u4f5c\u6280\u672f<\/td><\/tr>
\u5728\u8bbe\u8ba1\u3001\u5236\u9020\u3001\u5c01\u88c5\u548c\u6d4b\u8bd5\u65b9\u9762\u6ca1\u6709\u53ef\u53c2\u8003\u7684\u5de5\u4e1a\u6807\u51c6<\/td>  \u5b8c\u5584\u7684\u65b9\u6cd5\u548c\u5904\u7406\u8fc7\u7a0b<\/td><\/tr><\/tbody><\/table><\/figure>

\u81ea\u524d\u6211\u56fd\u7684\u9ad8\u7aefMEMS\u4f20\u611f\u5668\u4ea7\u4e1a\uff0c\u4e0e\u6b27\u7f8e\u65e5\u76f8\u6bd4\u8fd8\u5b58\u5728\u8f83\u5927\u5dee\u8ddd\uff0c\u4e2d\u56fd\u4f20\u611f\u5668\u82af\u7247<\/strong>\u8fdb\u53e3\u94dd\u9ad8\u8fbe90%\u4ee5\u4e0a\uff0c\u56fd\u5185\u4f01\u4e1a\u57fa\u672c\u96c6\u4e2d\u5728\u4ea7\u4e1a\u94fe\u7684\u4e2d\u4e0b\u6e38\uff0c\u5177\u6709\u81ea\u4e3b\u82af\u7247\u8bbe\u8ba1\u7684\u80fd\u529b\u7684\u4f01\u4e1a\u6bd4\u8f83\u5c11\uff0c\u6838\u5fc3\u6280\u672f\u4e25\u91cd\u6ede\u540e\u4e8e\u53d1\u8fbe\u56fd\u5bb6\u3002\u5728\u56fd\u5185\uff0c\u5927\u591a\u6570\u4f20\u611f\u5668\u5382\u5546\u91c7\u7528\u7684\u662f\u65e0\u6676\u5706\u5382fabless\u6a21\u5f0f\uff0c\u771f\u6b63\u62e5\u6709\u81ea\u5df1\u6676\u5706\u5382\u7684IDM\u6a21\u5f0f\u516c\u53f8\u975e\u5e38\u5c11\u4e14\u89c4\u6a21\u8f83\u5c0f\uff0c\u867d\u7136\u56fd\u5185\u5df2\u7ecf\u6709\u4e0d\u5c11\u6676\u5706\u4ee3\u5382\uff0c\u80fd\u591f\u751f\u4ea7MEMS\u4f20\u611f\u5668\u82af\u7247\uff0c\u786c\u4ef6\u6761\u4ef6\u4e5f\u63a5\u8fd1\u56fd\u9645\u6c34\u5e73\uff0c\u4f46\u5728\u5de5\u827a\u6280\u672f\u548c\u7ecf\u9a8c\u65b9\u9762\u4ecd\u7136\u65e0\u6cd5\u8fbe\u5230\u56fd\u5916\u5927\u5382\u5927\u6279\u91cf\u4ea7\u751f\u4ea7\u7684\u6807\u51c6\u3002\u56e0\u6b64\u8bb8\u591a\u672c\u571f\u7684\u8bbe\u8ba1\u516c\u53f8\uff0c\u66f4\u503e\u5411\u4e0e\u6d77\u5916\u6210\u719f\u7684\u4ee3\u5de5\u5382\u5408\u4f5c\u3002<\/p>

\"\"<\/figure>

\u5e38\u89c1\u7684MEMS\u4f20\u611f\u5668\u6709\u60ef\u6027\u4f20\u611f\u5668\u3001MEMS\u9ea6\u514b\u98ce\u3001\u6e29\u6e7f\u5ea6\u4f20\u611f\u5668\u3001\u9640\u87ba\u4eea\uff0c\u52a0\u901f\u5ea6\u3001\u538b\u529b\u4f20\u611f\u5668\u3001\u6c14\u4f53\u4f20\u611f\u5668\u7b49\u3002\u5176\u4e2d\uff0c\u6e29\u5ea6\u4f20\u611f\u5668\uff08Temperature Sensor\uff09\u662f\u4e00\u79cd\u7528\u4e8e\u6d4b\u91cf\u548c\u76d1\u6d4b\u73af\u5883\u6216\u7269\u4f53\u7684\u6e29\u5ea6\u7684\u8bbe\u5907\uff0c\u5b83\u80fd\u591f\u5c06\u6e29\u5ea6\u53d8\u5316\u8f6c\u5316\u4e3a\u7535\u4fe1\u53f7\u6216\u6570\u5b57\u4fe1\u53f7\u8f93\u51fa\uff0c\u4ee5\u4f9b\u8fdb\u4e00\u6b65\u5904\u7406\u3001\u663e\u793a\u6216\u8bb0\u5f55\u3002\u6e29\u5ea6\u4f20\u611f\u5668\u5728\u5404\u79cd\u5e94\u7528\u4e2d\u5e7f\u6cdb\u4f7f\u7528\uff0c\u5305\u62ec\u6c14\u8c61\u76d1\u6d4b\u3001\u5de5\u4e1a\u81ea\u52a8\u5316\u3001\u7535\u5b50\u8bbe\u5907\u3001\u533b\u7597\u4fdd\u5065\u3001\u6c7d\u8f66\u548c\u6d88\u8d39\u7535\u5b50\u7b49\u9886\u57df\u3002\u6e29\u5ea6\u4f20\u611f\u5668\u5e02\u573a\u89c4\u6a21\u9884\u8ba1\u5c06\u4ece 2023 \u5e74\u7684 82.8 \u4ebf\u7f8e\u5143\u589e\u957f\u5230 2028 \u5e74\u7684112.3\u4ebf\u7f8e\u5143\uff0c\u5728\u9884\u6d4b\u671f\u95f4\uff082023-2028 \u5e74\uff09\u7684\u590d\u5408\u5e74\u589e\u957f\u7387\u4e3a6.28%\u3002<\/p>

\u534e\u82af\u90a6\u96c6\u56e2\u7684\u82cf\u5dde\u7814\u53d1\u56e2\u961f\u516b\u5e74\u6765\u805a\u7126\u5728\u8bbe\u8ba1\u3001\u751f\u4ea7\u3001\u6d4b\u8bd5\u53ca\u4ee3\u5de5\u57fa\u4e8e\u7b2c\u56db\u4ee3\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u7684\u9ad8\u7cbe\u5ea6MEMS\u6e29\u5ea6\u4f20\u611f\u5668\u82af\u7247\u4e0a\uff0c\u4e3b\u8981\u4ece\u4e8bMEMS \u6e29\u5ea6\u4f20\u611f\u5668\u88f8\u7247\u3001\u6e29\u5ea6\u4f20\u611f\u5668\u82af\u7247\u3001\u6e29\u5ea6\u4f20\u611f\u5668\u6a21\u7ec4\u7684\u7814\u53d1\u3001\u751f\u4ea7\u548c\u9500\u552e\uff0c\u5e76\u6301\u7eed\u6784\u5efa\u201c\u7aef-\u8fb9-\u4e91\u201d\u7684\u7269\u8054\u7f51\u751f\u6001\u4f53\u7cfb\uff0c\u672a\u6765\u5c06\u4e3b\u8981\u5e94\u7528\u4e8e\u5bb6\u7535\u3001\u901a\u8baf\u53ca\u5de5\u4e1a\u63a7\u5236\u9886\u57df\uff0c\u540c\u65f6\u4e5f\u9010\u6e10\u5728\u6c7d\u8f66\u3001\u533b\u7597\u7b49\u9886\u57df\u6269\u5927\u5e94\u7528\u3002<\/p>

\u534e\u82af\u90a6\u79d1\u6280\u81f4\u529b\u4e8e\u524d\u6cbf\u79d1\u6280\u7684\u63a8\u52a8\uff0c\u5176\u6700\u65b0\u63a8\u51fa\u7684\u65b0\u578b\u7eb3\u7c73\u6750\u6599\u5c55\u73b0\u51fa\u975e\u51e1\u7684\u4f18\u52bf\uff0c\u6240\u751f\u4ea7\u7684\u6e29\u5ea6\u4f20\u611f\u5668\u82af\u7247\uff0c\u901a\u8fc7\u5b8c\u7f8e\u878d\u5408\u70ed\u7535\u963b\u4e0eIC\u6e29\u5ea6\u4f20\u611f\u5668\u7684\u4f18\u52bf\uff0c\u6210\u4e3a\u4e86\u4e00\u79cd\u521b\u65b0\u7684MEMS\u6e29\u5ea6\u4f20\u611f\u6280\u672f\u3002\u8fd9\u79cd\u82af\u7247\u4e0d\u4ec5\u5728\u6d4b\u6e29\u7cbe\u5ea6\u65b9\u9762\u5353\u5c14\u4e0d\u7fa4\uff0c\u800c\u4e14\u5728\u5c0f\u5c01\u88c5\u8bbe\u8ba1\u4e0a\u5b9e\u73b0\u4e86\u66f4\u52a0\u7d27\u51d1\u548c\u9ad8\u6548\u7684\u6027\u80fd\u8868\u73b0\u3002\u4e0d\u4ec5\u5982\u6b64\uff0c\u5176\u4f4e\u6210\u672c\u7684\u7279\u70b9\u4f7f\u5f97\u5e7f\u6cdb\u5e94\u7528\u6210\u4e3a\u53ef\u80fd\uff0c\u4e3a\u5404\u7c7b\u5de5\u4e1a\u548c\u5546\u4e1a\u9886\u57df\u5e26\u6765\u4e86\u9769\u547d\u6027\u7684\u6539\u53d8\u3002\u76f8\u6bd4\u4e8e\u4f20\u7edf\u7684\u6e29\u5ea6\u4f20\u611f\u5668\uff0c\u5c55\u793a\u4e86\u672a\u6765\u79d1\u6280\u53d1\u5c55\u7684\u65e0\u9650\u6f5c\u529b\uff0c\u65e0\u7591\u662f\u4e00\u4e2a\u4ee4\u4eba\u77a9\u76ee\u7684\u9009\u62e9\u3002\u5176\u516c\u53f8\u76ee\u524d\u5df2\u642d\u5efa\u9ad8\u7cbe\u5ea6MEMS\u6e29\u5ea6\u4f20\u611f\u5668\u7684\u751f\u4ea7\u3001\u5c01\u6d4b\u7ebf\uff0c\u4ece\u7eb3\u7c73\u6750\u6599\u5408\u6210\u5230\u6676\u5706\u7ea7\u63ba\u6742\u518d\u5230\u5c01\u88c5\u6d4b\u8bd5\u5747\u53ef\u5728\u4e00\u6761\u4ea7\u7ebf\u4e0a\u5b8c\u6210\uff0c\u5b9e\u73b0\u4e86\u5b8c\u5168\u81ea\u4e3b\u7684IDM\u751f\u4ea7\u5236\u9020\u6a21\u5f0f\u3002<\/p>

\"\"<\/figure>

\u516c\u53f8\u76ee\u524d\u5df2\u642d\u5efa\u5177\u6709\u6781\u9ad8\u7cbe\u5ea6\u7684MEMS\u6e29\u5ea6\u4f20\u611f\u5668\u751f\u4ea7\u548c\u5c01\u6d4b\u7ebf\uff0c\u4ea7\u7ebf\u4ece\u7eb3\u7c73\u6750\u6599\u7684\u5408\u6210\u5f00\u59cb\uff0c\u5230\u6676\u5706\u7ea7\u63ba\u6742\uff0c\u518d\u5230\u6700\u7ec8\u7684\u5c01\u88c5\u548c\u6d4b\u8bd5\uff0c\u6240\u6709\u5de5\u827a\u90fd\u53ef\u4ee5\u5728\u540c\u4e00\u6761\u4ea7\u7ebf\u4e0a\u5b8c\u6210\u3002\u4f7f\u5f97\u6211\u4eec\u5b9e\u73b0\u4e86\u5b8c\u5168\u81ea\u4e3b\u7684IDM\u751f\u4ea7\u5236\u9020\u6a21\u5f0f\uff0c\u5728\u8fd9\u6761\u4ea7\u7ebf\u4e0a\u65e0\u8bba\u662f\u6750\u6599\u7684\u9ad8\u7cbe\u5ea6\u63a7\u5236\uff0c\u8fd8\u662f\u9488\u5bf9\u4e8e\u6676\u5706\u7684\u7ec6\u81f4\u63ba\u6742\u5de5\u827a\uff0c\u4ee5\u81f3\u4e8e\u6700\u540e\u5c01\u88c5\u6d4b\u8bd5\u73af\u8282\u7684\u4e25\u683c\u628a\u5173\u90fd\u4f53\u73b0\u534e\u82af\u90a6\u79d1\u6280\u7684\u9ad8\u6280\u672f\u6c34\u51c6\u548c\u4e25\u683c\u7684\u8d28\u91cf\u7ba1\u7406\u4f53\u7cfb\u3002<\/p>","protected":false},"excerpt":{"rendered":"

\u534e\u82af\u90a6\u79d1\u6280\uff0cMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u9886\u57df\u7684\u4f7c\u4f7c\u8005\uff0c\u901a\u8fc7\u521b\u65b0\u6280\u672f\u548c\u5e02\u573a\u524d\u77bb\u5e03\u5c40\u6811\u7acb\u884c\u4e1a\u65b0\u5178\u8303\uff0c\u81f4\u529b\u4e8e\u63a8\u52a8\u667a\u80fd\u8bbe\u5907\u611f\u77e5\u6280\u672f\u7684\u7a81\u7834\u3002<\/p>\n","protected":false},"author":1,"featured_media":6265,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[29,30],"tags":[93,136,38],"class_list":["post-6261","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","category-hangyezixun","tag-mems","tag-136","tag-38"],"yoast_head":"\nMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746<\/title>\n<meta name=\"description\" content=\"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746\" \/>\n<meta property=\"og:description\" content=\"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\" \/>\n<meta property=\"og:site_name\" content=\"\u534e\u82af\u90a6\u5b98\u7f51\" \/>\n<meta property=\"article:published_time\" content=\"2024-07-18T06:21:56+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2024-07-18T06:22:35+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp\" \/>\n\t<meta property=\"og:image:width\" content=\"379\" \/>\n\t<meta property=\"og:image:height\" content=\"213\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/webp\" \/>\n<meta name=\"author\" content=\"hotchip\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"hotchip\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4\" \/>\n\t<meta name=\"twitter:data2\" content=\"2 \u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\"},\"author\":{\"name\":\"hotchip\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/1b8fe7673035f94ec8c3fe19e45764d8\"},\"headline\":\"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746\",\"datePublished\":\"2024-07-18T06:21:56+00:00\",\"dateModified\":\"2024-07-18T06:22:35+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\"},\"wordCount\":115,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp\",\"keywords\":[\"MEMS\u6e29\u5ea6\u4f20\u611f\u5668\",\"\u4f20\u611f\u5668\u82af\u7247\",\"\u534a\u5bfc\u4f53\"],\"articleSection\":[\"\u65b0\u95fb\u4e2d\u5fc3\",\"\u884c\u4e1a\u8d44\u8baf\"],\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\",\"url\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\",\"name\":\"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746\",\"isPartOf\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp\",\"datePublished\":\"2024-07-18T06:21:56+00:00\",\"dateModified\":\"2024-07-18T06:22:35+00:00\",\"description\":\"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55\",\"breadcrumb\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#breadcrumb\"},\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage\",\"url\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp\",\"contentUrl\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp\",\"width\":379,\"height\":213,\"caption\":\"mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.hotchip.com.cn\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#website\",\"url\":\"https:\/\/www.hotchip.com.cn\/\",\"name\":\"\u534e\u82af\u90a6\u5b98\u7f51\",\"description\":\"\u82af\u7247\u8bbe\u8ba1\u5c01\u88c5\u6d4b\u8bd5\u4e00\u7ad9\u5f0f\u670d\u52a1\u4f01\u4e1a\",\"publisher\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.hotchip.com.cn\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-Hans\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#organization\",\"name\":\"\u534e\u82af\u90a6\u5b98\u7f51\",\"url\":\"https:\/\/www.hotchip.com.cn\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/05\/hotchip-LOGO-40.png\",\"contentUrl\":\"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/05\/hotchip-LOGO-40.png\",\"width\":110,\"height\":40,\"caption\":\"\u534e\u82af\u90a6\u5b98\u7f51\"},\"image\":{\"@id\":\"https:\/\/www.hotchip.com.cn\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/1b8fe7673035f94ec8c3fe19e45764d8\",\"name\":\"hotchip\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/54ad7142e307c1055fb2d83823cdd6ba?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/54ad7142e307c1055fb2d83823cdd6ba?s=96&d=mm&r=g\",\"caption\":\"hotchip\"},\"sameAs\":[\"http:\/\/www.hotchip.com.cn\"],\"url\":\"https:\/\/www.hotchip.com.cn\/author\/hotchip\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746","description":"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/","og_locale":"zh_CN","og_type":"article","og_title":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746","og_description":"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55","og_url":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/","og_site_name":"\u534e\u82af\u90a6\u5b98\u7f51","article_published_time":"2024-07-18T06:21:56+00:00","article_modified_time":"2024-07-18T06:22:35+00:00","og_image":[{"width":379,"height":213,"url":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp","type":"image\/webp"}],"author":"hotchip","twitter_card":"summary_large_image","twitter_misc":{"\u4f5c\u8005":"hotchip","\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4":"2 \u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#article","isPartOf":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/"},"author":{"name":"hotchip","@id":"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/1b8fe7673035f94ec8c3fe19e45764d8"},"headline":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746","datePublished":"2024-07-18T06:21:56+00:00","dateModified":"2024-07-18T06:22:35+00:00","mainEntityOfPage":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/"},"wordCount":115,"commentCount":0,"publisher":{"@id":"https:\/\/www.hotchip.com.cn\/#organization"},"image":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage"},"thumbnailUrl":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp","keywords":["MEMS\u6e29\u5ea6\u4f20\u611f\u5668","\u4f20\u611f\u5668\u82af\u7247","\u534a\u5bfc\u4f53"],"articleSection":["\u65b0\u95fb\u4e2d\u5fc3","\u884c\u4e1a\u8d44\u8baf"],"inLanguage":"zh-Hans","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/","url":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/","name":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746","isPartOf":{"@id":"https:\/\/www.hotchip.com.cn\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage"},"image":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage"},"thumbnailUrl":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp","datePublished":"2024-07-18T06:21:56+00:00","dateModified":"2024-07-18T06:22:35+00:00","description":"\u534e\u82af\u90a6\u79d1\u6280\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8eMEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u7684\u5148\u950b\u4f01\u4e1a\uff0c\u6b63\u901a\u8fc7\u5176\u524d\u77bb\u6027\u7684\u5e02\u573a\u5e03\u5c40\u548c\u521b\u65b0\u6280\u672f\u6253\u9020\u884c\u4e1a\u65b0\u6807\u6746\u3002\u8be5\u516c\u53f8\u81f4\u529b\u4e8e\u7814\u53d1\u9ad8\u6027\u80fd\u3001\u4f4e\u529f\u8017\u7684\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u65e8\u5728\u4e3a\u667a\u80fd\u8bbe\u5907\u63d0\u4f9b\u66f4\u7cbe\u51c6\u7684\u611f\u77e5\u80fd\u529b\uff0c\u63a8\u52a8\u667a\u80fd\u79d1\u6280\u7684\u53d1\u5c55","breadcrumb":{"@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#breadcrumb"},"inLanguage":"zh-Hans","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/"]}]},{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#primaryimage","url":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp","contentUrl":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/07\/mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-fm.webp","width":379,"height":213,"caption":"mems\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746"},{"@type":"BreadcrumbList","@id":"https:\/\/www.hotchip.com.cn\/memscgqxpsjgs-hxbkjqzbjdzhybg\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.hotchip.com.cn\/"},{"@type":"ListItem","position":2,"name":"MEMS\u4f20\u611f\u5668\u82af\u7247\u8bbe\u8ba1\u516c\u53f8-\u534e\u82af\u90a6\u79d1\u6280\u524d\u77bb\u5e03\u5c40\u6253\u9020\u884c\u4e1a\u6807\u6746"}]},{"@type":"WebSite","@id":"https:\/\/www.hotchip.com.cn\/#website","url":"https:\/\/www.hotchip.com.cn\/","name":"\u534e\u82af\u90a6\u5b98\u7f51","description":"\u82af\u7247\u8bbe\u8ba1\u5c01\u88c5\u6d4b\u8bd5\u4e00\u7ad9\u5f0f\u670d\u52a1\u4f01\u4e1a","publisher":{"@id":"https:\/\/www.hotchip.com.cn\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.hotchip.com.cn\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-Hans"},{"@type":"Organization","@id":"https:\/\/www.hotchip.com.cn\/#organization","name":"\u534e\u82af\u90a6\u5b98\u7f51","url":"https:\/\/www.hotchip.com.cn\/","logo":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.hotchip.com.cn\/#\/schema\/logo\/image\/","url":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/05\/hotchip-LOGO-40.png","contentUrl":"https:\/\/www.hotchip.com.cn\/wp-content\/uploads\/2024\/05\/hotchip-LOGO-40.png","width":110,"height":40,"caption":"\u534e\u82af\u90a6\u5b98\u7f51"},"image":{"@id":"https:\/\/www.hotchip.com.cn\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/1b8fe7673035f94ec8c3fe19e45764d8","name":"hotchip","image":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.hotchip.com.cn\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/54ad7142e307c1055fb2d83823cdd6ba?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/54ad7142e307c1055fb2d83823cdd6ba?s=96&d=mm&r=g","caption":"hotchip"},"sameAs":["http:\/\/www.hotchip.com.cn"],"url":"https:\/\/www.hotchip.com.cn\/author\/hotchip\/"}]}},"_links":{"self":[{"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/posts\/6261"}],"collection":[{"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/comments?post=6261"}],"version-history":[{"count":2,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/posts\/6261\/revisions"}],"predecessor-version":[{"id":6267,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/posts\/6261\/revisions\/6267"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/media\/6265"}],"wp:attachment":[{"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/media?parent=6261"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/categories?post=6261"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.hotchip.com.cn\/wp-json\/wp\/v2\/tags?post=6261"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}