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\"\u533b\u7597\u96fe\u5316\u5668MEMS\u7845\u9ea6\u5f00\u5173\u5e94\u7528\"<\/figure>

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\"MEMS<\/figure>

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\"\u4f20\u611f\u5668MEMS\u5f00\u5173\u9ea6\u673a\u68b0\u89c4\u683c\"<\/figure>

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1\u3001\u9ad8\u53ef\u9760\u6027\u4e0e\u957f\u671f\u7a33\u5b9a\u6027\uff1b<\/p>

2\u3001\u7cbe\u5ea6\u9ad8\uff0c\u91cd\u590d\u6027\u597d\uff0c\u59cb\u52a8\u6d41\u91cf\u5c0f\uff0c\u91cf\u7a0b\u6bd4\u5bbd\uff0c\u65e0\u673a\u68b0\u78e8\u635f\u3002<\/p>

3\u3001\u5fae\u529f\u8017\u3001\u54cd\u5e94\u901f\u5ea6\u5feb\uff08\u5178\u578b\u503c\uff1a5ms)\u3002<\/p>

4\u3001\u672c\u4ea7\u54c1\u6d4b\u91cf\u539f\u7406\u4e3a\u70ed\u8d28\u91cf\u6c14\u4f53\u6d41\u91cf\u4f20\u611f\u5668\u91cf\uff0c\u4e0d\u53d7\u6e29\u5ea6\u53ca\u538b\u529b\u5f71\u54cd\u3002<\/p>

5\u3001\u72ec\u7279\u7684\u6574\u6d41\u5668\u7ed3\u6784\uff0c\u80fd\u66f4\u597d\u7684\u6539\u5584\u6d41\u573a\u6270\u52a8\u72b6\u51b5\uff0c\u964d\u4f4e\u4e86\u524d\u540e\u76f4\u7ba1\u6bb5\u957f\u5ea6\u3002<\/p>

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\"\"<\/figure>

\u5178\u578b\u5e94\u7528\u7535\u8def\u56fe<\/strong><\/p>

\"\"<\/figure>

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